This school is aiming to provide participants with the deeper understandings of basic physics and chemistry underlying the plasma application technologies largely expanding into various scientific and industrial areas.
In the first part, the basic principle of plasma discharges will be introduced with typical examples of currently used plasma sources such as ICP, CCP and wave-heated sources.
In the next part, physical mechanisms for the formation of electron energy distributions (EEDFs) in reactive plasmas will be explained depending on the discharge conditions.
It is followed by the experimental techniques diagnosing the EEDFs directly and the productions of reactive species as the consequence of EEDFs through the electron collision processes.
http://plasma. kuee.kyoto- u.ac.jp/ispc18/ summer-school. php
[sursa romstudyabroad]
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