The Fraunhofer-Center Nanoelectronic Technologies CNT in Dresden, established in May 2005 as a Public-Private Partnership with Advanced Micro Devices (AMD) and Qimonda (former DRAM division of Infineon Technologies) as Industry Partners is offering the following
PhD position: Investigation of High
Resolution E-Beam Processes
The Fraunhofer Center of Nanoelectronic Technologies CNT in Dresden is partner in the project »Mask Less Lithography« (MAGIC), a large-scale collaborative project of the 7th European Framework program for pushing the insertion of mask less litho technology into semiconductor manufacturing. The CNT operates an E-Beam lithography cell consisting of a shaped beam e-beam tool, resist track and numerous analytic tools.
The PhD student will be responsible for the process development and tool benchmark within this project. This work includes different R&D tasks at the Dresden site, as well as on sites of the project partners.
Main technical tasks will be:
Performing test exposures on CNT Tool as well as on tools of project partners
Benchmark of different ML2 tools
Investigation of e-beam unit processes at CNT
Usage of metrology tools in CNT for characterization
Study the integrability of new tool concepts into memory device fabrication process
Generation of IP (inventions, publications).
All work tasks will be undertaken in close cooperation with the »Center of Competence E-Beam« Dresden, tool vendors and project partners (e.g. Qimonda).
Suitable fields:
Physics
Materials Science
Electrical Engineering
Prerequisites:
Good knowledge of physical analysis techniques and semiconductor technology,
Good technical comprehension,
Interest in practical work,
Organizing skills,
Creativity, flexibility and good team work skills
Willingness to travel
Beneficial qualification:
Knowledge optical lithography / e-beam lithography
Experience in Structural Characterization (SEM, TEM, AFM, etc.)
The position is limited for two years, however an extension of one year is possible. The duration of employment is based on HRG i.d.j.g.F. / § 47 SächsHG. The salary will be in accordance with the German tariff regulation (TVöD-Ost).
Please send your electronic application with all important documents and the code number CNT-2007-4 to: info@cnt.fraunhofer.de
For questions regarding this position please contact:
Martin Landgraf, phone +49 351 2607-3004,
email: info@cnt.fraunhofer.de
www.cnt.fraunhofer.de
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